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Ultraviolet diode pumped solid state (DPSS) lasers system has high reliability, processing repeatability is good wait for a characteristic, is widely used in micro machining, surface treatment and materials processing and other fields. This UVDPSS laser processing method is better than other laser processing method, chemical or mechanical processing method, in semiconductor and other industrial application has great development potential.
In scribing, hole drilling, cutting, structure and other fields widely used DPSS laser micro processing was carried out on the following materials processing: chemical vapor deposition of silicon, sapphire, CVD diamond, III - V semiconductor (arsenic, indium phosphide, phosphate, potassium) and group III nitride (nitride, aluminum nitride), etc. DPSS laser is also used in ceramic, plastic and metal materials processing.